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Clean room
A space where dust concentration in the air, temperature, humidity and pressure must be strictly controlled in order to ensure high purity. Since the contamination by foreign substances may not exceed certain ppm values by the manufacture of electrical equipment and components (semiconductors ), the production must take place in a clean room. The U.S. standard FED -STD- 209E defines the clean- room conditions as follows:
| Clean room class |
Highest concentration of dust particles over 0,5 µm/ft 3 /l) |
Highest concentration of dust particles over 5 µm/ft 3 /l) |
| 100 |
100 (3,5) |
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| 10.000 |
10.000 (350) |
65 (2,3) |
| 100.000 |
100.000 (3.500) |
700 (25) |
| Clean room class according to
ISO 14644-1 |
Highest concentration of dust particles over 0,5 µm/ft 3 /l) |
Highest concentration of dust particles over 5 µm/ft 3 /l) |
| 100 – ISO5 |
3520 |
29 |
| 10.000 – ISO 7 |
352000 |
2930 |
| 100.000 – ISO 8 |
3520000 |
29300 |
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